Invention Grant
US07067958B2 Wide frequency range electromechanical actuator 有权
宽频率机电执行机构

Wide frequency range electromechanical actuator
Abstract:
An electromechanical actuator 10 is disclosed, having drive elements (14a–d) movable in two dimensions and connected to an actuator backing (12). The actuator backing (12) is made of a material being ferromechanically inactive. Furthermore, the joint between the drive element (14a–d) and the actuator backing (12) is stiff and highly stable. This is achieved by use of an irreversible joint made e.g. by thermoset plastic glues, diffusion bonding or co-sintering. Co-sintering is to prefer. The actuator backing (12) material is selected to be stiff, preferably having a stiffness above 70 GPa and more preferably above 100 GPa, and having a high heat conductivity, preferably above 5 W/mK and more preferably above 10 W/mK, Electrodes (22) are preferably integrated in the actuator backing to increase stiffness as well as improving the heat conductivity. The drive elements (14a–d) are preferably covered (28, 26), at least at the driving surface, by heat-conducting material.
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