发明授权
- 专利标题: Method for forming polycrystalline silicon thin film transistor
- 专利标题(中): 多晶硅薄膜晶体管的形成方法
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申请号: US11085953申请日: 2005-03-22
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公开(公告)号: US07026201B2公开(公告)日: 2006-04-11
- 发明人: Kyoung Seok Son , Myung Kwan Ryu , Jae Chul Park , Eok Su Kim , Jun Ho Lee , Se Yeoul Kwon , Jang Soon Im
- 申请人: Kyoung Seok Son , Myung Kwan Ryu , Jae Chul Park , Eok Su Kim , Jun Ho Lee , Se Yeoul Kwon , Jang Soon Im
- 申请人地址: KR Kyoungki-do
- 专利权人: Boe Hydis Technology Co., Ltd
- 当前专利权人: Boe Hydis Technology Co., Ltd
- 当前专利权人地址: KR Kyoungki-do
- 代理机构: Seyfarth Shaw LLP
- 代理商 Timothy J Keefer
- 优先权: KR10-2004-0071602 20040908
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for forming a polycrystalline silicon thin film transistor. The method includes the steps of: forming a polycrystalline silicon layer including multiple protrusions by crystallizing the amorphous silicon layer according to a crystallization method in which the multiple protrusions are formed due to collision between crystal grains; patterning the polycrystalline silicon layer in an active pattern which includes only two protrusions of the multiple protrusions, which are apart from each other and located at both sides of a gate electrode-forming area; applying a barrier layer on the patterned polycrystalline silicon layer while partially covering the two protrusions; and forming a source electrode and a drain electrode at the protrusions of the polycrystalline silicon layer formed at both sides of the gate electrode-forming area by ion-implanting dopants into a resultant lamination.
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