- 专利标题: Mass flow ratio system and method
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申请号: US10816084申请日: 2004-04-01
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公开(公告)号: US07007707B2公开(公告)日: 2006-03-07
- 发明人: Jesse Ambrosina , Nicholas E. Kottenstette , Ali Shajii
- 申请人: Jesse Ambrosina , Nicholas E. Kottenstette , Ali Shajii
- 申请人地址: US MA Wilmington
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: McDermott Will & Emery LLP
- 主分类号: G05D11/13
- IPC分类号: G05D11/13 ; G05D7/06
摘要:
A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.
公开/授权文献
- US20040187928A1 Mass flow ratio system and method 公开/授权日:2004-09-30
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