发明授权
US06970757B1 Method and apparatus for updating control state variables of a process control model based on rework data
有权
基于返工数据更新过程控制模型的控制状态变量的方法和装置
- 专利标题： Method and apparatus for updating control state variables of a process control model based on rework data
- 专利标题（中）： 基于返工数据更新过程控制模型的控制状态变量的方法和装置
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申请号： US09838467申请日： 2001-04-19
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公开(公告)号： US06970757B1公开(公告)日： 2005-11-29
- 发明人: Joyce S. Oey Hewett , Anthony J. Toprac , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
- 申请人： Joyce S. Oey Hewett , Anthony J. Toprac , Christopher A. Bode , Alexander J. Pasadyn , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
- 申请人地址： US TX Austin
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Williams, Morgan & Amerson
- 主分类号： G05B19/418
- IPC分类号： G05B19/418 ; G06F19/00
摘要：
A method for controlling a manufacturing process includes processing a plurality of workpieces in a tool; monitoring a rework rate associated with the workpieces processed in the tool; and initiating an automatic corrective action in response to the rework rate being greater than a predetermined threshold. A manufacturing system includes a tool adapted to process a plurality of workpieces and a rework controller adapted to monitor a rework rate associated with the workpieces processed in the tool and initiate an automatic corrective action in response to the rework rate being greater than a predetermined threshold.
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