发明授权
US06951772B2 Process for protection of the surface of a fixed contact for a semiconductor color image sensor cell during a coloring process
有权
用于在着色过程中保护用于半导体彩色图像传感器单元的固定触点的表面的工艺
- 专利标题: Process for protection of the surface of a fixed contact for a semiconductor color image sensor cell during a coloring process
- 专利标题(中): 用于在着色过程中保护用于半导体彩色图像传感器单元的固定触点的表面的工艺
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申请号: US10739871申请日: 2003-12-18
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公开(公告)号: US06951772B2公开(公告)日: 2005-10-04
- 发明人: Baudoin Lecohier , Brendan Dunne
- 申请人: Baudoin Lecohier , Brendan Dunne
- 申请人地址: FR Montrouge
- 专利权人: STMicroelectronics SA
- 当前专利权人: STMicroelectronics SA
- 当前专利权人地址: FR Montrouge
- 代理机构: Fleit, Kain, Gibbons, Gutman, Bongini & Bianco P.L.
- 代理商 Lisa K. Jorgenson; Jon A. Gibbons
- 优先权: FR0216118 20021218
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L31/0216 ; H01L31/0232 ; H01L31/18 ; H01L21/00
摘要:
The invention relates to a process for making a semiconductor color image sensor cell comprising a metal layer in which a fixed contact is defined, an anti-reflecting layer covering the metal layer and a passivation layer covering the assembly. The method includes etching the passivation layer and stopping on the anti-reflecting layer so as to form a hole for the opening of the fixed contact; forming at least one colored filter element on a region of the passivation layer, the anti-reflecting layer then acting as a protection layer for the surface of the fixed contact; depositing a planarizing resin layer so as to cover the colored filter elements; forming micro-lenses on the planarizing resin layer above the colored filter elements; and etching the anti-reflecting layer to open the fixed contact.
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