发明授权
- 专利标题： Surface acoustic wave device
- 专利标题（中）： 表面声波装置
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申请号： US10610925申请日： 2003-07-01
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公开(公告)号： US06879225B2公开(公告)日： 2005-04-12
- 发明人: Michio Kadota , Hideya Horiuchi , Takeshi Nakao , Yasuhiro Kuratani , Masakazu Mimura , Junya Ago
- 申请人： Michio Kadota , Hideya Horiuchi , Takeshi Nakao , Yasuhiro Kuratani , Masakazu Mimura , Junya Ago
- 申请人地址： JP Kyoto
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人地址： JP Kyoto
- 代理机构： Keating & Bennett, LLP
- 优先权： JP2002-197451 20020705
- 主分类号： H03H9/145
- IPC分类号： H03H9/145 ; H03H3/10 ; H03H9/02 ; H03H9/25 ; H03H9/64 ; H03H9/15
摘要：
A surface acoustic wave device includes a Y-cut, X-propagation LiTaO3 substrate, at least one interdigital transducer provided on the LiTaO3 substrate and made of Al or a metal containing Al as a major component, and an SiO2 film provided on the surface of the LiTaO3 substrate so as to cover the interdigital transducer, wherein the thickness Hs of the SiO2 film normalized by the wavelength λ of a surface acoustic wave and the cut angle θ of the LiTaO3 substrate are set to be in any one of the ranges represented by formulae (1) to (8): in the case of 0.00
公开/授权文献
- US20040061574A1 Surface acoustic wave device 公开/授权日：2004-04-01
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