Invention Grant
US06828046B2 Soft magnetic film of FeCoMO having a high saturation flux density, a moderate soft magnetism and a uniaxial magnetic anisotropy
失效
具有高饱和磁通密度,中等软磁性和单轴磁各向异性的FeCoMO软磁膜
- Patent Title: Soft magnetic film of FeCoMO having a high saturation flux density, a moderate soft magnetism and a uniaxial magnetic anisotropy
- Patent Title (中): 具有高饱和磁通密度,中等软磁性和单轴磁各向异性的FeCoMO软磁膜
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Application No.: US09960419Application Date: 2001-09-21
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Publication No.: US06828046B2Publication Date: 2004-12-07
- Inventor: Shoji Ikeda , Ikuya Tagawa , Yuji Uehara , Yoshinori Ohtsuka
- Applicant: Shoji Ikeda , Ikuya Tagawa , Yuji Uehara , Yoshinori Ohtsuka
- Priority: JP2001-116021 20010413
- Main IPC: G11B533
- IPC: G11B533

Abstract:
A soft magnetic film comprising Fe, Co, a metallic element (M), and oxygen (O) is provided. The soft magnetic film is represented by a composition formula of (Fe1-aCoa)xMyOz. The metallic element (M) is one selected from a group consisting of Al, B, Ga, Si, Ge, Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Rh, Ru, Ni, Pd and Pt, or is an alloy composed of at least two selected from this group. The composition formula fulfills the following conditions: a=0.05-0.65; y=0.2-9 at %, z=1-12 at %, and y+z=
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