Invention Grant
US06828046B2 Soft magnetic film of FeCoMO having a high saturation flux density, a moderate soft magnetism and a uniaxial magnetic anisotropy 失效
具有高饱和磁通密度,中等软磁性和单轴磁各向异性的FeCoMO软磁膜

Soft magnetic film of FeCoMO having a high saturation flux density, a moderate soft magnetism and a uniaxial magnetic anisotropy
Abstract:
A soft magnetic film comprising Fe, Co, a metallic element (M), and oxygen (O) is provided. The soft magnetic film is represented by a composition formula of (Fe1-aCoa)xMyOz. The metallic element (M) is one selected from a group consisting of Al, B, Ga, Si, Ge, Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Rh, Ru, Ni, Pd and Pt, or is an alloy composed of at least two selected from this group. The composition formula fulfills the following conditions: a=0.05-0.65; y=0.2-9 at %, z=1-12 at %, and y+z=
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