发明授权
- 专利标题: Tungsten film coating method using tungsten oxide powders
- 专利标题(中): 使用氧化钨粉末的钨膜涂覆方法
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申请号: US10340505申请日: 2003-01-10
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公开(公告)号: US06821557B2公开(公告)日: 2004-11-23
- 发明人: Seong Lee , Moon-Hee Hong , Joon-Woong Noh , Eun-Pyo Kim , Yoon-Sik Park
- 申请人: Seong Lee , Moon-Hee Hong , Joon-Woong Noh , Eun-Pyo Kim , Yoon-Sik Park
- 优先权: KR10-2002-0024857 20020506
- 主分类号: B05D112
- IPC分类号: B05D112
摘要:
Disclosed is a tungsten film coating method using tungsten oxide powders including the steps of contacting the tungsten oxide powders with a metal substrate and carrying out thermal reduction treatment thereon at a temperature of at least 650° C. under a hydrogen atmosphere just to coat the tungsten film on the metal substrate. Accordingly, the present invention enables to provide a simple method of coating a tungsten thin film on a metal substrate using the phenomenon of tungsten migration through vapor phase when thermal reduction treatment is carried out on tungsten oxide powders without using previous chemical or physical vapor depositions requiring expensive precision equipments or causing environmental pollution.
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