发明授权
US06812480B2 Triode structure field emission display device using carbon nanotubes and method of fabricating the same 失效
使用碳纳米管的三极结构场致发射显示装置及其制造方法

  • 专利标题: Triode structure field emission display device using carbon nanotubes and method of fabricating the same
  • 专利标题(中): 使用碳纳米管的三极结构场致发射显示装置及其制造方法
  • 申请号: US10347622
    申请日: 2003-01-22
  • 公开(公告)号: US06812480B2
    公开(公告)日: 2004-11-02
  • 发明人: Hang-woo LeeSang-jin LeeShang-hyeun Park
  • 申请人: Hang-woo LeeSang-jin LeeShang-hyeun Park
  • 优先权: KR2002-3687 20020122
  • 主分类号: H01L2100
  • IPC分类号: H01L2100
Triode structure field emission display device using carbon nanotubes and method of fabricating the same
摘要:
A field emission display device and a method of fabricating the same are provided. The field emission display device includes a substrate, a transparent cathode layer, an insulation layer, a gate electrode, a resistance layer, and carbon nanotubes. The transparent cathode layer is deposited on the substrate. The insulation layer is formed on the cathode layer and has a well exposing the cathode layer. The gate electrode is formed on the insulation layer and has an opening corresponding to the well. The resistance layer is formed to surround the surface of the gate electrode and the inner walls of the opening and the well so as to block ultraviolet rays. The carbon nanotube field emitting source is positioned on the exposed cathode layer. An alignment error between the gate electrode and the cathode is removed, and carbon nanotube paste is prevented from remaining during development, thereby preventing current leakage and short circuit between the electrodes and diode emission. Accordingly, the performance of the field emission display device can be improved.
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