Invention Grant
US06789327B2 Touch probe with deflection measurement and inspection optics 失效
带偏转测量和检测光学元件的触摸式探头

Touch probe with deflection measurement and inspection optics
Abstract:
A touch probe 9 for a coordinate measuring apparatus is proposed which includes a touch probe chassis 29 adapted to be attached to the coordinate measuring apparatus, a support for the sensing stylus 39 which is mounted on the touch probe chassis 29 so as to be deflectable from a rest position and on which a sensing stylus 47 is mountable for contacting a workpiece 17, a deflection measuring system 55, 57 for detecting a deflection of the support for the sensing stylus 39 with respect to the touch probe chassis 29 and an inspection optics 61 for inspecting a tip 49 of the sensing stylus 47. The touch probe 1 is characterized in that at least one of the components support for the sensing stylus 39 and touch probe chassis 29 comprises a transverse support 39 which extends transversely to a direction of extension of the sensing stylus 47 and which is transparent to light in at least a portion thereof and which is disposed in a beam path 69 of the inspection optics 61.
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