Invention Grant
- Patent Title: Method for manufacturing flash memory device
- Patent Title (中): 闪存器件制造方法
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Application No.: US10321720Application Date: 2002-12-18
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Publication No.: US06759299B2Publication Date: 2004-07-06
- Inventor: Young Bok Lee , Sung Mun Jung , Jung Ryul Ahn
- Applicant: Young Bok Lee , Sung Mun Jung , Jung Ryul Ahn
- Priority: KR10-2002-0042159 20020718
- Main IPC: H01L218247
- IPC: H01L218247

Abstract:
The present invention relates to a method of manufacturing a flash memory device. In the method, a low-voltage transistor is formed to have a DDD structure same to a high-voltage transistor when a peripheral region is formed in the manufacture process of the flash memory device. As the process for forming the LDD structure for the low voltage is omitted, the cost is reduced in the entire process of manufacturing the flash memory device. Also, as the junction breakdown voltage of the low-voltage transistor is increased and current is increased, the device characteristics is improved
Public/Granted literature
- US20040014285A1 Method for manufacturing flash memory device Public/Granted day:2004-01-22
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