发明授权
- 专利标题: Bump reflow method by inert gas plasma
- 专利标题(中): 通过惰性气体等离子体进行爆破回流
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申请号: US10124998申请日: 2002-04-18
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公开(公告)号: US06712260B1公开(公告)日: 2004-03-30
- 发明人: Wen-Chang Kuo , Chia-Fu Lin , Sheng-Liang Pan , Szu-Yao Wang , Cheng-Yu Chu
- 申请人: Wen-Chang Kuo , Chia-Fu Lin , Sheng-Liang Pan , Szu-Yao Wang , Cheng-Yu Chu
- 主分类号: B23K3102
- IPC分类号: B23K3102
摘要:
A method of forming reflowed bumps comprising the following sequential steps. A wafer is provided. A series of spaced initial bumps is formed upon the wafer. The initial bumps having exposed side walls and top surfaces and organic residue over the initial bump side walls and/or the initial bump top surfaces. The organic residue is simultaneously removed from the initial bump side walls and top surfaces with the forming a surface oxide layer over the initial bump side walls and top surfaces. The surface oxide layer is stripped from the initial bump top surfaces and an upper portion of the initial bump side walls to form partially exposed bumps. The partially exposed bumps are heat treated to melt the partially exposed bumps to form the reflowed bumps.
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