发明授权
US06701593B2 Process for producing inkjet printhead 有权
喷墨打印头的制造方法

Process for producing inkjet printhead
摘要:
An ink cartridge having a piezoelectric jet module has an ink storage module having a hollow ink storage region, a piezoelectric jet module having a plurality of ink chambers and a connection circuit, and an ink channel connected to the ink storage module and to the piezoelectric jet module. The piezoelectric inkjet printhead has a bottom film and chamber walls which are obtained by applying a photosensitive polymer on a substrate on which a piezoelectric layer has been formed and carrying out photolithography.
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