发明授权
- 专利标题： Method of fabricating near-field light-generating element
- 专利标题（中）： 制造近场光产生元件的方法
-
申请号： US10195340申请日： 2002-07-15
-
公开(公告)号： US06689545B2公开(公告)日： 2004-02-10
- 发明人: Nobuyuki Kasama , Manabu Oumi , Yasuyuki Mitsuoka , Kenji Kato , Hidetaka Maeda , Takashi Niwa , Yoko Shinohara
- 申请人： Nobuyuki Kasama , Manabu Oumi , Yasuyuki Mitsuoka , Kenji Kato , Hidetaka Maeda , Takashi Niwa , Yoko Shinohara
- 优先权： JP2001-214732 20010716
- 主分类号： G03F700
- IPC分类号： G03F700
摘要：
A method of fabricating a near-field light-generating element having a minute scattering body inside an aperture, the scattering body producing plasmons by being illuminated with light, includes a step of forming minute scattering bodies periodically arranged on a substrate, a step of selecting the periodically arranged minute scattering bodies except for only one minute scattering body, and a step of forming the aperture such that the single minute scattering body is placed inside the aperture.
公开/授权文献
信息查询
