发明授权
- 专利标题： Aqueous dispersion, a process for the preparation and the use thereof
- 专利标题（中）： 水分散体，其制备方法和用途
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申请号： US10023903申请日： 2001-12-21
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公开(公告)号： US06676719B2公开(公告)日： 2004-01-13
- 发明人: Wolfgang Lortz , Christoph Batz-Sohn , Helmut Mangold , Gabriele Perlet , Werner Will
- 申请人： Wolfgang Lortz , Christoph Batz-Sohn , Helmut Mangold , Gabriele Perlet , Werner Will
- 优先权： DE10065027 20001223
- 主分类号： C09C300
- IPC分类号： C09C300
摘要：
A pyrogenic process is used to prepare alkali-doped silica particles. Particles produced by this process exhibit homogeneous doping, reduced agglomeration, greater stability and higher removal rates. Aqueous dispersions containing alkali-doped pyrogenic silica with average particle size less than 100 nm are used for polishing surfaces (CMP).
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