发明授权
- 专利标题: Aqueous dispersion for chemical mechanical polishing used for polishing of copper
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申请号: US09893961申请日: 2001-06-29
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公开(公告)号: US06653267B2公开(公告)日: 2003-11-25
- 发明人: Hiroyuki Yano , Gaku Minamihaba , Masayuki Motonari , Masayuki Hattori , Nobuo Kawahashi
- 申请人: Hiroyuki Yano , Gaku Minamihaba , Masayuki Motonari , Masayuki Hattori , Nobuo Kawahashi
- 优先权: JP2000-199462 20000630
- 主分类号: C11D328
- IPC分类号: C11D328
摘要:
The present invention provides an aqueous dispersion for chemical mechanical polishing suitable for polishing of copper, which has a high polishing speed and a low erosion rate with overpolishing. The aqueous dispersion for chemical mechanical polishing of the invention contains a compound having a heterocycle, a surfactant and an oxidizing agent, wherein the compound having a heterocycle and the surfactant are in a weight ratio of 1:10 to 1:0.03. The aqueous dispersion may also contain abrasive particle. The compound having a heterocycle is preferably quinaldic acid, benzotriazole or the like. The surfactant is preferably a sulfonic acid salt such as potassium dodecylbenzenesulfonate or ammonium dodecylbenzenesulfonate, and the oxidizing agent is preferably ammonium persulfate, hydrogen peroxide or the like. The abrasive particle used may be inorganic particle such as colloidal silica, an organic particle such as polymer particle, or an organic/inorganic composite particle comprising a combination thereof.
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