Invention Grant
- Patent Title: Scanning electron microscope
- Patent Title (中): 扫描电子显微镜
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Application No.: US10069571Application Date: 2002-07-15
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Publication No.: US06646262B1Publication Date: 2003-11-11
- Inventor: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- Applicant: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- Main IPC: H01J3720
- IPC: H01J3720

Abstract:
A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.
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