Invention Grant
- Patent Title: Microoptoelectromechanical system (MOEMS) based laser
- Patent Title (中): 基于微机电系统(MOEMS)的激光器
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Application No.: US09849922Application Date: 2001-05-04
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Publication No.: US06643313B2Publication Date: 2003-11-04
- Inventor: Donald P. Hutchinson
- Applicant: Donald P. Hutchinson
- Main IPC: H01S303
- IPC: H01S303

Abstract:
A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.
Public/Granted literature
- US20020163951A1 Microoptoelectromechanical system (MOEMS) based laser Public/Granted day:2002-11-07
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