Invention Grant
US06643313B2 Microoptoelectromechanical system (MOEMS) based laser 失效
基于微机电系统(MOEMS)的激光器

  • Patent Title: Microoptoelectromechanical system (MOEMS) based laser
  • Patent Title (中): 基于微机电系统(MOEMS)的激光器
  • Application No.: US09849922
    Application Date: 2001-05-04
  • Publication No.: US06643313B2
    Publication Date: 2003-11-04
  • Inventor: Donald P. Hutchinson
  • Applicant: Donald P. Hutchinson
  • Main IPC: H01S303
  • IPC: H01S303
Microoptoelectromechanical system (MOEMS) based laser
Abstract:
A method for forming a folded laser and associated laser device includes providing a waveguide substrate, micromachining the waveguide substrate to form a folded waveguide structure including a plurality of intersecting folded waveguide paths, forming a single fold mirror having a plurality of facets which bound all ends of said waveguide paths except those reserved for resonator mirrors, and disposing a pair of resonator mirrors on opposite sides of the waveguide to form a lasing cavity. A lasing material is provided in the lasing cavity. The laser can be sealed by disposing a top on the waveguide substrate. The laser can include a re-entrant cavity, where the waveguide substrate is disposed therein, the re-entrant cavity including the single fold mirror.
Public/Granted literature
Information query
Patent Agency Ranking
0/0