发明授权
- 专利标题: Method and device for non-destructive analysis of perforation in a material
- 专利标题(中): 材料穿孔非破坏性分析方法和装置
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申请号: US09330254申请日: 1999-06-10
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公开(公告)号: US06624885B1公开(公告)日: 2003-09-23
- 发明人: Russell M. Pon , Rajesh S. Patel , James M. Bovatsek , Jeffrey A. Schuster , Geoffrey K. McKinley , Sze-The Young
- 申请人: Russell M. Pon , Rajesh S. Patel , James M. Bovatsek , Jeffrey A. Schuster , Geoffrey K. McKinley , Sze-The Young
- 主分类号: G01N2100
- IPC分类号: G01N2100
摘要:
A method for inspecting small holes in a material is disclosed. The method comprises directing a light source through the holes in the material, and then focusing the light passing through the material onto a CCD detector. The focusing techniques allow for a reduction in the size of the image which must be inspected, thereby increasing sample throughput, while still allowing for detailed inspection of the hole number and quality. Methods of producing an aerosolization container and device comprising membranes which pass such an inspection are also provided.
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