发明授权
- 专利标题: Platen for retaining polishing material
- 专利标题(中): 压板用于保留抛光材料
-
申请号: US09709769申请日: 2000-11-10
-
公开(公告)号: US06592439B1公开(公告)日: 2003-07-15
- 发明人: Shijian Li , Manoocher Birang , Ramin Emami , Andrew Nagengast , Douglas Orcutt Brown , Shi-Ping Wang , Martin Scales , John White
- 申请人: Shijian Li , Manoocher Birang , Ramin Emami , Andrew Nagengast , Douglas Orcutt Brown , Shi-Ping Wang , Martin Scales , John White
- 主分类号: B24B2900
- IPC分类号: B24B2900
摘要:
Generally, a method and apparatus for retaining polishing material is provided. In one embodiment, the apparatus includes a platen having a top surface, a plurality of channels and one or more vacuum ports. The top surface is adapted to support the polishing material. The plurality of channels are formed in a polishing area of the top surface. The vacuum ports are disposed in the platen and at least one port is in communication with at least one of the channels. Upon application of a vacuum to the ports, the channels remove fluids under the polishing material while securing the polishing material to the top surface.
信息查询