发明授权
- 专利标题: Dicing method
- 专利标题(中): 切片方法
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申请号: US09660261申请日: 2000-09-12
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公开(公告)号: US06498075B1公开(公告)日: 2002-12-24
- 发明人: Kouji Fujimoto , Toshiyuki Tateishi
- 申请人: Kouji Fujimoto , Toshiyuki Tateishi
- 优先权: JP11-260333 19990914
- 主分类号: H01L2146
- IPC分类号: H01L2146
摘要:
The present invention is to provide a dicing method of cutting a workpiece along the first streets and the second streets by using a cutting blade having an annular cutting edge provided on the outer peripheral portion on one side surface of a base plate, the workpiece having plural first streets and second streets intersected each other at a predetermined angle. When the second streets are to be cut after the first streets are cut, the cutting blade is so positioned that the side of the base plate faces the side of the unworked region of the workpiece.
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