Invention Grant
- Patent Title: MEMS optical cross-connect switch
- Patent Title (中): MEMS光交叉连接开关
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Application No.: US09489264Application Date: 2000-01-21
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Publication No.: US06396975B1Publication Date: 2002-05-28
- Inventor: Robert L. Wood , Edward A. Hill , Ramaswamy Mahadevan
- Applicant: Robert L. Wood , Edward A. Hill , Ramaswamy Mahadevan
- Main IPC: G02B626
- IPC: G02B626

Abstract:
A microelectromechanical structure capable of switching optical signals from an input fiber to one of two or more output fibers. In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a rotational magnetic field source, such as a variably controlled magnetic field source. The rotational magnetic field source allows for reliable actuation of the pop-up mirror from a non-reflective state to a reflective state. Additionally the invention is embodied in a MEMS optical cross-connect switch having a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a positioning structure disposed in a fixed positional relationship relative to the first substrate. The positioning structure may comprise a positioning structure extending from a second microelectronic substrate that is in a fixed positional relationship relative to the first microelectronic substrate. The positioning structure serves to restrict further movement of the pop-up mirror when the pop-up mirror has been actuated into a reflective state.
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