发明授权
US06395451B1 Photoresist composition containing photo base generator with photo acid generator
失效
含有光产酸剂的光源组合物的光致抗蚀剂组合物
- 专利标题: Photoresist composition containing photo base generator with photo acid generator
- 专利标题(中): 含有光产酸剂的光源组合物的光致抗蚀剂组合物
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申请号: US09666932申请日: 2000-09-21
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公开(公告)号: US06395451B1公开(公告)日: 2002-05-28
- 发明人: Jae Chang Jung , Keun Kyu Kong , Jin Soo Kim , Ki Ho Baik
- 申请人: Jae Chang Jung , Keun Kyu Kong , Jin Soo Kim , Ki Ho Baik
- 优先权: KR99-40534 19990921
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
The present invention relates to a photoresist composition containing Photo Base Generator (PBG), more specifically, to a photoresist composition which comprises (a) photoresist resin, (b) photo acid generator, (c) organic solvent and further (d) photo base generator. The photo base generator is preferably selected from benzyloxycarbonyl compound of Chemical Formula 1 or O-acyloxime compound of Chemical Formula 2, which prevents a slopping pattern formation and a severe I/D Bias occurrence. wherein, R′, R1 to R6 are defined in accordance with the Specification.
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