Invention Grant
US06368773B1 Photoresist cross-linker and photoresist composition comprising the same
失效
光阻抗交联剂和包含其的光致抗蚀剂组合物
- Patent Title: Photoresist cross-linker and photoresist composition comprising the same
- Patent Title (中): 光阻抗交联剂和包含其的光致抗蚀剂组合物
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Application No.: US09448916Application Date: 1999-11-24
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Publication No.: US06368773B1Publication Date: 2002-04-09
- Inventor: Jae Chang Jung , Keun Kyu Kong , Myoung Soo Kim , Hyoung Gi Kim , Hyeong Soo Kim , Ki Ho Baik , Jin Soo Kim
- Applicant: Jae Chang Jung , Keun Kyu Kong , Myoung Soo Kim , Hyoung Gi Kim , Hyeong Soo Kim , Ki Ho Baik , Jin Soo Kim
- Priority: KR98-51355 19981127; KR99-5823 19990222
- Main IPC: G03F7027
- IPC: G03F7027

Abstract:
The present invention relates to a cross-linker for photoresist compositions which is suitable for a photolithography process using KrF (248 mn), ArF (193 mn), E-beam, ion beam or EUV light sources. Preferred cross-linkers, according to the present invention, comprise a copolymer of (i) a compound represented by following Chemical Formula 1 and/or (ii) one or more compound(s) selected from the group consisting of acrylic acid, methacrylic acid and maleic anhydride. wherein, R1 and R2 individually represent straight or branched C1-10 alkyl, straight or branched C1-10 ester, straight or branched C1-10 ketone, straight or branched C1-10 carboxylic acid, straight or branched C1-10 acetal, straight or branched C1-10 alkyl including at least one hydroxyl group, straight or branched C1-10 ester including at least one hydroxyl group, straight or branched C1-10 ketone including at least one hydroxyl group, straight or branched C1-10 carboxylic acid including at least one hydroxyl group, and straight or branched C1-10 acetal including at least one hydroxyl group; and R3 represents hydrogen or methyl.
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