发明授权
- 专利标题: Method for forming a uniform network of semiconductor islands on an insulating substrate
- 专利标题(中): 在绝缘基板上形成半导体岛的均匀网络的方法
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申请号: US09554277申请日: 2000-06-06
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公开(公告)号: US06365491B1公开(公告)日: 2002-04-02
- 发明人: François Martin , Jean-Michel Nunzi , Brigitte Mouanda , Serge Palacin , Jean-Philippe Bourgoin
- 申请人: François Martin , Jean-Michel Nunzi , Brigitte Mouanda , Serge Palacin , Jean-Philippe Bourgoin
- 优先权: FR9716158 19971219
- 主分类号: H10L2120
- IPC分类号: H10L2120
摘要:
A method of forming a network of islands (124) of semiconductor material on an electrically insulating material (112), comprising: p1 a) the deposition of nucleation kernels (122) on the surface of the electrically insulating material, b) the formation of islands of semiconductor material (124) respectively on the nucleation kernels. In accordance with the invention, the deposition of the nucleation kernels is effected using at least one so-called distribution layer (116) made of a material having a substantially regular molecular structure, formed on the surface of the electrically insulating material (112), in order to distribute the nucleation kernels in a substantially regular fashion on the surface of the electrically insulating material.
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