发明授权
- 专利标题: Scrub washing apparatus and scrub washing method
- 专利标题(中): 洗涤洗涤装置和擦洗方法
-
申请号: US09281531申请日: 1999-03-30
-
公开(公告)号: US06292972B1公开(公告)日: 2001-09-25
- 发明人: Akira Ishihara , Akira Yonemizu , Takanori Miyazaki
- 申请人: Akira Ishihara , Akira Yonemizu , Takanori Miyazaki
- 优先权: JP10-102165 19980330
- 主分类号: A46B1304
- IPC分类号: A46B1304
摘要:
A scrub washing apparatus comprises a spin chuck for holding a substrate to be processed substantially horizontally, a nozzle for supplying a washing liquid to the substrate mounted on the spin chuck, an arm vertically and horizontally movably supported, an output shaft provided at the arm, a sponge brush connected directly or indirectly to the output shaft, for scrubbing the substrate on the spin chuck in contact therewith, a press mechanism moving the sponge brush downward together with the output shaft, for pressing the sponge brush against the substrate on the spin chuck, and a rotation drive mechanism provided above the press mechanism at a position where the rotation drive mechanism is capable of being engaged with the output shaft, for directly rotating the sponge brush by engaging with the output shaft.
信息查询