The present invention provides a novel group of particles for air filter inspection which solves problems caused by volatilization and scattering of those particles at the downstream side of the air filter in use, enables an air filter inspection with superior stability and reproducibility, and may be produced by using a comparative inexpensive manufacturing device, and manufacturing methods as well as inspection methods of such a group of particles. The group of particles for air filter inspection consists of a plurality of aggregate particles having a particle size of not less than 0.1 &mgr;m, each aggregate particle being constituted by solid primary particles having an average particle size of less than 55 nm. Further, the inspection method for an air filter has the steps of: producing the group of particles by atomizing and drying a suspension containing the solid primary particles having the average particle size of less than 55 nm, introducing the group of particles into the upstream side of the air filter, and detecting any of the group of particles leaked out of the downstream side of the air filter with a particle detector.