发明授权
US06258508B1 Polymer using norbornene monomers with derivatives of cholic acid, deoxycholic acid or lithocholic acid and use thereof 失效
使用具有胆酸,脱氧胆酸或石胆酸衍生物的降冰片烯单体的聚合物及其用途

  • 专利标题: Polymer using norbornene monomers with derivatives of cholic acid, deoxycholic acid or lithocholic acid and use thereof
  • 专利标题(中): 使用具有胆酸,脱氧胆酸或石胆酸衍生物的降冰片烯单体的聚合物及其用途
  • 申请号: US09514220
    申请日: 2000-02-25
  • 公开(公告)号: US06258508B1
    公开(公告)日: 2001-07-10
  • 发明人: Jin Baek KimBum Wook Lee
  • 申请人: Jin Baek KimBum Wook Lee
  • 优先权: KR99-6989 19990303
  • 主分类号: G03F7004
  • IPC分类号: G03F7004
Polymer using norbornene monomers with derivatives of cholic acid, deoxycholic acid or lithocholic acid and use thereof
摘要:
The present invention relates to a polymer prepared by synthesizing monomer having a derivative of cholic acid, deoxycholic acid or lithocholic acid bonded to norbornene, and then homopolymerizing these monomer, copolymerizing these monomer with maleic anhydride, or copolymerizing these monomer, maleic anhydride and 2-hydroxyethyl 5-norbornene-2-carboxylate and/or 5-norbornene-2carboxylic acid, and its use as a photoresist. The polymer synthesized according to the present invention is dissolved in a solvent, together with a photo-acid generator, and filtered through a filter to make a photoresist solution which can be used to produce a lithographic image on a silicon wafer.
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