发明授权
- 专利标题： IC testing apparatus
- 专利标题（中）： IC测试仪器
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申请号： US09357906申请日： 1999-07-21
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公开(公告)号： US06257319B1公开(公告)日： 2001-07-10
- 发明人: Tadashi Kainuma , Noboru Masuda , Haruki Nakajima , Noriyuki Igarashi , Yuichi Nansai
- 申请人： Tadashi Kainuma , Noboru Masuda , Haruki Nakajima , Noriyuki Igarashi , Yuichi Nansai
- 优先权： JP10-209631 19980724; JP10-209633 19980724; JP10-209634 19980724
- 主分类号： G01R3102
- IPC分类号： G01R3102
摘要：
An IC testing apparatus 1 for performing a test by applying at least a low temperature stress to ICs to be tested comprising a refrigerant cycle 210 wherein at least a compressor 211, condenser 212, expansion valve 214 and evaporator 215 are connected in this order, and a cold air applying line 220 having a blower 223 for supplying heat exchanged cold air by the evaporator 215 to the ICs to be tested.
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