Invention Grant
US06184055B2 CMOS image sensor with equivalent potential diode and method for fabricating the same 有权
具有等效电位二极管的CMOS图像传感器及其制造方法

  • Patent Title: CMOS image sensor with equivalent potential diode and method for fabricating the same
  • Patent Title (中): 具有等效电位二极管的CMOS图像传感器及其制造方法
  • Application No.: US09258814
    Application Date: 1999-02-26
  • Publication No.: US06184055B2
    Publication Date: 2001-02-06
  • Inventor: Woodward YangJu Il LeeNan Yi Lee
  • Applicant: Woodward YangJu Il LeeNan Yi Lee
  • Priority: KR98-6687 19980228
  • Main IPC: H01L2100
  • IPC: H01L2100
CMOS image sensor with equivalent potential diode and method for fabricating the same
Abstract:
A CMOS image sensor according to the present invention has a low-voltage photodiode which is fully depleted at a bias of 1.2-4.5V. The photodiode comprises: a P-epi layer; a field oxide layer dividing the P-epi layer into a field region and an active region; a N− region formed within the P-epi layer, wherein the first impurity region is apart from the isolation layer; and a P0 region of the conductive type formed beneath a surface of the P-epi layer and on the N− region, wherein a width of the P0 region is wider than that of the N− region so that a portion of the P0 region is formed on the P-epi layer, whereby the P0 region has the same potential as the P-epi layer.
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