发明授权
US6163101A Piezoelectric resonator 有权
压电谐振器

Piezoelectric resonator
摘要:
A piezoelectric resonator includes two sealing substrates, a seal portion, and an energy-trap type piezoelectric resonance element which is adapted to vibrate in a third harmonic of thickness extensional vibration. The piezoelectric resonance element includes a piezoelectric substrate and a pair of excitation electrodes, which are disposed on opposite major surfaces of the piezoelectric substrate. A portion of the piezoelectric substrate sandwiched by the excitation electrodes defines a vibrating portion. The sealing substrates each have a cavity formed therein and are attached onto the corresponding major surfaces of the piezoelectric substrate such that the cavities define a space for vibration. The seal portion is formed around the vibration space so as to damp leaking vibration. The vibrating portion is arranged such that the approximate center thereof is spaced from the approximate center of the vibration space as viewed along the major surfaces of the piezoelectric resonance element.
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