Invention Grant
- Patent Title: Integrated circuit spiral inductor
- Patent Title (中): 集成电路螺旋电感
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Application No.: US949316Application Date: 1997-10-14
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Publication No.: US6114937APublication Date: 2000-09-05
- Inventor: Joachim Norbert Burghartz , Daniel Charles Edelstein , Christopher Vincent Jahnes , Cyprian Emeka Uzoh
- Applicant: Joachim Norbert Burghartz , Daniel Charles Edelstein , Christopher Vincent Jahnes , Cyprian Emeka Uzoh
- Applicant Address: NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: NY Armonk
- Main IPC: H01F17/00
- IPC: H01F17/00 ; H01F17/06 ; H01F27/28 ; H01F30/16 ; H01F41/04 ; H01L23/522 ; H01F5/00
Abstract:
High quality factor (Q) spiral and toroidal inductor and transformer are disclosed that are compatible with silicon very large scale integration (VLSI) processing, consume a small IC area, and operate at high frequencies. The spiral inductor has a spiral metal coil deposited in a trench formed in a dielectric layer over a substrate. The metal coil is enclosed in ferromagnetic liner and cap layers, and is connected to an underpass contact through a metal filled via in the dielectric layer. The spiral inductor also includes ferromagnetic cores lines surrounded by the metal spiral coil. A spiral transformer is formed by vertically stacking two spiral inductors, or placing them side-by-side over a ferromagnetic bridge formed below the metal coils and cores lines. The toroidal inductor includes a toroidal metal coil with a core having ferromagnetic strips. The toroidal metal coil is segmented into two coils each having a pair of ports to form a toroidal transformer.
Public/Granted literature
- US4202929A Production of non-stick coatings Public/Granted day:1980-05-13
Information query
IPC分类:
H | 电学 |
H01 | 基本电气元件 |
H01F | 磁体;电感;变压器;磁性材料的选择 |
H01F17/00 | 信号类型的固定电感器 |