发明授权
- 专利标题: Method for the manufacture of electronic components
- 专利标题(中): 电子元件制造方法
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申请号: US959310申请日: 1997-10-28
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公开(公告)号: US6039849A公开(公告)日: 2000-03-21
- 发明人: Jeffrey R. Paulson , Arturo Fonda
- 申请人: Jeffrey R. Paulson , Arturo Fonda
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; H01J37/32
摘要:
An apparatus (10) such as a plasma sputtering tool has a reaction chamber (11) containing a sputtering target (12) and a semiconductor substrate (13). The apparatus (10) also has a plasma ignitor (70) that is used to excite the gas molecules in the reaction chamber (11) and help generate a plasma in the reaction chamber (11). The plasma ignitor (70) has a relay (59) that is used to activate or deactivate filaments (51,52) at the appropriate times to initiate the formation of a plasma in the reaction chamber (11).
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