Invention Grant
US5980212A Anode-cathode structure for ion pump having specifically determined
dimensions
失效
具有特定尺寸的离子泵的阳极 - 阴极结构
- Patent Title: Anode-cathode structure for ion pump having specifically determined dimensions
- Patent Title (中): 具有特定尺寸的离子泵的阳极 - 阴极结构
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Application No.: US773775Application Date: 1996-12-26
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Publication No.: US5980212APublication Date: 1999-11-09
- Inventor: Guo Hua Shen , Nozomu Takagi , Toshihiro Terasawa , Tsuyoshi Kotani , Hiroyuki Kinpara , Katsuji Nakajima , Hiroyuki Miho
- Applicant: Guo Hua Shen , Nozomu Takagi , Toshihiro Terasawa , Tsuyoshi Kotani , Hiroyuki Kinpara , Katsuji Nakajima , Hiroyuki Miho
- Applicant Address: JPX Kanagawa-ken
- Assignee: Nihon Shinku Gijutsu Kabushiki Kaisha
- Current Assignee: Nihon Shinku Gijutsu Kabushiki Kaisha
- Current Assignee Address: JPX Kanagawa-ken
- Priority: JPX7-338966 19951226
- Main IPC: H01J41/20
- IPC: H01J41/20 ; F04B37/02 ; F04F11/00 ; H01J7/16
Abstract:
A sputter ion pump in which the ratio of the length L to the diameter D of each anode cell forming a multi-cell anode inserted between two cathodes is defined within a certain range, thereby increasing a critical vacuum level to be evacuated and achieving a higher exhaust speed.
Public/Granted literature
- US4146585A Process for preparing silane grafted polymers Public/Granted day:1979-03-27
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