发明授权
US5969820A Surface position detecting system and exposure apparatus using the same
失效
表面位置检测系统及使用其的曝光装置
- 专利标题： Surface position detecting system and exposure apparatus using the same
- 专利标题（中）： 表面位置检测系统及使用其的曝光装置
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申请号： US873748申请日： 1997-06-12
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公开(公告)号： US5969820A公开(公告)日： 1999-10-19
- 发明人: Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
- 申请人： Minoru Yoshii , Masanobu Hasegawa , Kyoichi Miyazaki
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX8-174335 19960613; JPX8-174337 19960613
- 主分类号： G03F9/00
- IPC分类号： G03F9/00 ; G01B11/00
摘要：
A surface position detecting system for detecting a position of a surface of an object disposed opposed to an exposure system, with respect to a direction of an optical system of the exposure system, includes an irradiation device for projecting light to the surface of the object, obliquely with respect to the optical axis of the exposure system, a detecting device for detecting light from the surface of the object irradiated with light from the irradiation device, the detecting device detecting a position of the surface of the object with respect to the optical axis direction of the exposure system, and a light quantity adjusting device provided in at least least one of the irradiation device and the detecting device, for controlling the quantity of light passage.
公开/授权文献
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