发明授权
- 专利标题: Catadioptric optical system and adjusting method
- 专利标题(中): 反射折射光学系统和调节方法
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申请号: US882939申请日: 1997-06-26
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公开(公告)号: US5835284A公开(公告)日: 1998-11-10
- 发明人: Tetsuo Takahashi , Yasuhiro Omura
- 申请人: Tetsuo Takahashi , Yasuhiro Omura
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-188365 19960628
- 主分类号: G02B17/08
- IPC分类号: G02B17/08 ; G03F7/20 ; H01L21/027
摘要:
A catadioptric optical system in which a first imaging optical system is constructed of a unidirectional optical apparatus which transmits outgoing light from a first plane in one direction only and a bidirectional optical apparatus for transmitting the light that enters and reflecting the same to form an interim image of the first plane. A light guide guides the light from the interim image to a second imaging optical system through which the interim image is reimaged on a second plane. The unidirectional optical apparatus has an optical axis and at least one lens movable along the optical axis.
公开/授权文献
- US5333720A Apparatus to manipulate workpieces 公开/授权日:1994-08-02
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |