Invention Grant
- Patent Title: Vibration actuator
- Patent Title (中): 振动执行器
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Application No.: US866325Application Date: 1997-05-30
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Publication No.: US5825118APublication Date: 1998-10-20
- Inventor: Mitsuhiro Okazaki
- Applicant: Mitsuhiro Okazaki
- Applicant Address: JPX Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JPX Tokyo
- Priority: JPX8-136617 19960530
- Main IPC: H02N2/00
- IPC: H02N2/00 ; H01L41/09 ; H02N2/04 ; H01L41/08
Abstract:
A vibration actuator combines plural elastic members and vibration elements to generate torsional vibrations about an axis and longitudinal vibrations in an axial direction. The vibration actuator includes a fixed member passing through a hollow portion of a plurality of vibration elements and supports the vibration elements within a gap in an inner surface of the vibration elements. A combination of semicylindrical members generate a second order torsional vibration around the axis and a first order longitudinal vibration in the axial direction of the vibration actuator. The fixed shaft also passes through a hollow portion of the vibration element. The vibration element and the fixed shaft are affixed by a pin, thereby eliminating a need for a more restrictive connection with bolts. Thus, vibration restriction of the vibration actuator is enhanced and driving efficiency is increased.
Public/Granted literature
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