Invention Grant
- Patent Title: Radiation-sensitive positive resist composition
- Patent Title (中): 辐射敏感正光刻胶组合物
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Application No.: US217892Application Date: 1994-03-25
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Publication No.: US5792585APublication Date: 1998-08-11
- Inventor: Ayako Ida , Haruyoshi Osaki , Takeshi Hioki , Yasunori Doi , Yasunori Uetani , Ryotaro Hanawa
- Applicant: Ayako Ida , Haruyoshi Osaki , Takeshi Hioki , Yasunori Doi , Yasunori Uetani , Ryotaro Hanawa
- Applicant Address: JPX Osaka
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JPX Osaka
- Priority: JPX1-261375 18981005; JPX1-219194 19890824; JPX1-219089 19890825; JPX1-234280 19890908; JPX1-262712 19891006; JPX1-262713 19891006; JPX1-341457 19891227; JPX1-341458 19891227; JPX1-341459 19891227
- Main IPC: C07C39/15
- IPC: C07C39/15 ; G03F7/004 ; G03F7/022 ; G03F7/023 ; H01L21/027 ; H01L21/30
Abstract:
A positive resist composition comprising 1,2-quinonediazide compound and, as an alkali-soluble resin, an alkali-soluble resin (A) which comprises a resin (I) obtainable through a condensation reaction of a mixture of m-cresol, 2,3,5-trimethylphenol and optionally p-cresol with an aldehyde and a low molecular weight novolak (II) having a weight average molecular weight of 200 to 2000 as converted to polystyrene, an alkali-soluble resin (B) which comprises a resin (I) and a compound of the general formula (III): ##STR1## wherein R.sub.1, R.sub.2 and R.sub.3 are respectively a C.sub.1 -C.sub.5 alkyl group or a C.sub.1 -C.sub.5 alkoxy group, 1, m and n are respectively a number of 0 to 3, R' is a hydrogen atom or a C.sub.1 -C.sub.3 alkyl group, or an alkali-soluble resin (C) which comprises a resin (IV) obtainable through a condensation reaction of a mixture of m-methoxyphenol and 2,3,5-trimethylphenol in a molar ratio of 80:20 to 30:70 with an aldehyde, which has good sensitivity, improved resolution and heat resistance.
Public/Granted literature
- USD307492S Cuticle treatment kit Public/Granted day:1990-04-24
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