- 专利标题: Convection-shielded cryopump
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申请号: US773816申请日: 1996-12-19
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公开(公告)号: US5727392A公开(公告)日: 1998-03-17
- 发明人: Stephen R. Matte
- 申请人: Stephen R. Matte
- 申请人地址: MA Mansfield
- 专利权人: Helix Technology Corporation
- 当前专利权人: Helix Technology Corporation
- 当前专利权人地址: MA Mansfield
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; F25D19/00 ; B01D8/00
摘要:
A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.
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