发明授权
US5693382A Frame-supported pellicle for dustproof protection of photomask in
photolithography
失效
用于光刻中光掩模防尘保护的框架支撑防护薄膜
- 专利标题: Frame-supported pellicle for dustproof protection of photomask in photolithography
- 专利标题(中): 用于光刻中光掩模防尘保护的框架支撑防护薄膜
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申请号: US647140申请日: 1996-05-09
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公开(公告)号: US5693382A公开(公告)日: 1997-12-02
- 发明人: Yuichi Hamada , Satoshi Kawakami , Toru Shirasaki , Yoshihiko Nagata , Meguru Kashida , Yoshihiro Kubota
- 申请人: Yuichi Hamada , Satoshi Kawakami , Toru Shirasaki , Yoshihiko Nagata , Meguru Kashida , Yoshihiro Kubota
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-311913 19931213
- 主分类号: C09J127/12
- IPC分类号: C09J127/12 ; G03F1/62 ; G03F1/64 ; G03F7/20 ; H01L21/027 ; A47G1/12
摘要:
Disclosed is a frame-supported pellicle, which is an integral body consisting of a rigid frame and a transparent plastic film adhesively bonded to one end surface of the frame in a slack-free fashion, for dustproof protection of a photomask used in a photolithographic patterning work in the manufacture of fine electronic devices such as LSIs and liquid crystal display panels. The frame-supported pellicle is prepared by bonding the frame and plastic film with an adhesive having a glass transition temperature substantially lower than that of the polymeric resin forming the film and the adhesive bonding work is performed at a temperature higher than the glass transition temperature of the adhesive but lower than that of the polymeric resin of the film so that excellent adhesive bonding strength can be obtained between the frame and the resin film still without causing any adverse influences on the resin film such as distortion and crease formation.
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