发明授权
- 专利标题： High purity fused silica having high resistance to optical damage
- 专利标题（中）： 高纯度熔融二氧化硅具有高抗光损伤性
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申请号： US697094申请日： 1996-08-19
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公开(公告)号： US5668067A公开(公告)日： 1997-09-16
- 发明人: Roger J. Araujo , Nicholas F. Borrelli , Christine L. Hoaglin , Charlene Smith
- 申请人： Roger J. Araujo , Nicholas F. Borrelli , Christine L. Hoaglin , Charlene Smith
- 申请人地址： NY Corning
- 专利权人： Corning Incorporated
- 当前专利权人： Corning Incorporated
- 当前专利权人地址： NY Corning
- 主分类号： C03B8/04
- IPC分类号： C03B8/04 ; C03B19/14 ; C03B20/00 ; C03C3/06 ; C03C4/00
摘要：
The invention relates to the production of high purity fused silica glass which is highly resistant to optical damage by ultraviolet radiation in the laser wavelength of about 300 nm or shorter. In particular, this invention relates to a fused silica optical member or blank which exhibits substantially no optical damage up to 10.sup.7 pulses (350 mJ/cm.sup.2) at the KrF laser wavelength region of about 248 nm, and at the ArF laser wavelength region of about 193 nm.
公开/授权文献
- US5081908A Hydraulic pump having floating spigot valve 公开/授权日：1992-01-21
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