Invention Grant
US5655886A Vacuum maintenance device for high vacuum chambers 失效
真空室真空维护装置

Vacuum maintenance device for high vacuum chambers
Abstract:
An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump, due to its small size and integration within the vacuum chamber, enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.
Public/Granted literature
Information query
Patent Agency Ranking
0/0