发明授权
US5617898A Fluid pressure apparatus 失效
流体压力装置

Fluid pressure apparatus
摘要:
A fluid pressure apparatus of this invention provides advanced control without imposing an excessive burden on a sequencer. When a plurality of fluid pressure apparatuses are connected to one another by manifolds, the individual fluid pressure apparatuses are provided with controller circuits each having a memory inputted with a control step, wherein each of the controller circuits activates each of control valves and a sensor based on an operating instruction issued from the sequencer to thereby execute processes such as confirmation of a controlled state, a trouble decision, etc.
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