发明授权
- 专利标题: Gas sensor using ionic conductor
- 专利标题(中): 气体传感器采用离子导体
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申请号: US364749申请日: 1994-12-27
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公开(公告)号: US5520789A公开(公告)日: 1996-05-28
- 发明人: Hideaki Takahashi , Tadashi Inaba , Haruyoshi Kondo
- 申请人: Hideaki Takahashi , Tadashi Inaba , Haruyoshi Kondo
- 申请人地址: JPX Aichi-ken
- 专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人地址: JPX Aichi-ken
- 优先权: JPX5-354122 19931227
- 主分类号: G01N27/41
- IPC分类号: G01N27/41 ; G01N27/406 ; G01N27/407 ; G01N27/409
摘要:
A gas sensor using an ionic conductor has a thin-film gas detection portion on an alumina substrate. The gas detection portion comprises a zirconia ionic conductor layer, a pair of platinum electrodes provided with the ionic conductor layer interposed therebetween, and a pair of junction layers positioned between the ionic conductor layer and each electrode and formed in a state in which the substances of the ionic conductor layers and the electrodes are mixed therein.The gas sensor using an ionic conductor is formed by sequentially forming a first electrode, a first junction layer, an ionic conductor layer, a second junction layer, and a second electrode by a physical vapor deposition method on a substrate, wherein the first and second junction layers are formed to be in a state in which the substances of the ionic conductor layers and the electrodes are both present.
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