Invention Grant
- Patent Title: Surface acoustic wave device
- Patent Title (中): 表面声波装置
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Application No.: US236015Application Date: 1994-05-02
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Publication No.: US5434465APublication Date: 1995-07-18
- Inventor: Takahiro Sato , Hidenori Abe
- Applicant: Takahiro Sato , Hidenori Abe
- Applicant Address: JPX Tokyo
- Assignee: Nikko Kyondo Co., Ltd.
- Current Assignee: Nikko Kyondo Co., Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX4-088409 19920313; JPX5-042642 19930303
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H01L41/08
Abstract:
A surface acoustic wave device comprises a piezoelectric substrate of lithium tetraborate single crystal, and a metal film formed on the surface of the piezoelectric substrate for exciting, receiving, reflecting and/or propagating surface acoustic waves, the metal film being so formed that a cut angle of the surface of the piezoelectric substrate and propagation direction of the surface acoustic wave are an Eulerian angle representation of (0.degree.-45.degree., 30.degree.-90.degree., 40.degree.-90.degree.) and directions equivalent thereto, the surface acoustic wave having higher propagation velocity than Rayleigh waves and leaky waves, and a characteristic of radiating part of energy of the surface acoustic wave into the piezoelectric surface while propagating.
Public/Granted literature
- US4887628A Fluidic apparatus Public/Granted day:1989-12-19
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