发明授权
US5405796A Capacitor and method of formation and a memory cell formed therefrom
失效
电容器和形成方法以及由其形成的记忆单元
- 专利标题: Capacitor and method of formation and a memory cell formed therefrom
- 专利标题(中): 电容器和形成方法以及由其形成的记忆单元
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申请号: US182470申请日: 1994-01-18
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公开(公告)号: US5405796A公开(公告)日: 1995-04-11
- 发明人: Robert E. Jones, Jr.
- 申请人: Robert E. Jones, Jr.
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: H01G4/33
- IPC分类号: H01G4/33 ; H01G4/40 ; H01L21/02 ; H01L21/822 ; H01L21/8242 ; H01L27/04 ; H01L27/108
摘要:
A capacitor for use in a memory cell (10). A transistor is formed overlying a substrate (10). The transistor has a first current electrode (16) and a second current electrode (18). The current electrodes (16 and 18) are separated by a channel region. A gate electrode (26) is formed overlying the channel region and is physically separated from the channel region by a gate dielectric layer (24). A plug region (32) is formed overlying and electrically connected to the first current electrode (16). An annular high-permittivity dielectric region (33) is formed overlying the transistor and is formed from a high-permittivity dielectric layer (36). A first capacitor electrode is formed via a conductive region (38"), and a second capacitor electrode is formed via a conductive region (38'). The memory cell (10) can be formed as a non-volatile memory cell or a DRAM cell depending upon various properties of the annular high-permittivity dielectric region (33).
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