Invention Grant
US5401530A Process for fabricating a Josephson device 失效
制造约瑟夫逊装置的工艺

Process for fabricating a Josephson device
Abstract:
A process for producing a Josephson device is disclosed, wherein a Josephson junction is formed over a recess step by oblique deposition and a protective layer of conducting material or semiconducting material is formed on the Josephson junction. The actual thickness of the Josephson junction is controlled to be smaller due to the proximity effect.
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