Invention Grant
- Patent Title: Process for fabricating micromachines
- Patent Title (中): 微机械制造工艺
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Application No.: US887749Application Date: 1992-05-26
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Publication No.: US5366587APublication Date: 1994-11-22
- Inventor: Minoru Ueda , Michitomo Iiyama
- Applicant: Minoru Ueda , Michitomo Iiyama
- Applicant Address: JPX Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JPX Osaka
- Priority: JPX3-149461 19910524; JPX3-149462 19910524; JPX3-149463 19910524
- Main IPC: C04B41/53
- IPC: C04B41/53 ; C04B41/91 ; C23C16/40 ; G03F7/00 ; H01L21/306
Abstract:
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.
Public/Granted literature
- US4691889A Joint construction and overhead hanger Public/Granted day:1987-09-08
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