发明授权
- 专利标题: Filtered cathodic arc source
- 专利标题(中): 过滤阴极电弧源
-
申请号: US921780申请日: 1992-07-30
-
公开(公告)号: US5279723A公开(公告)日: 1994-01-18
- 发明人: Steven Falabella , David M. Sanders
- 申请人: Steven Falabella , David M. Sanders
- 申请人地址: DC Washington
- 专利权人: as represented by the United States Department of Energy
- 当前专利权人: as represented by the United States Department of Energy
- 当前专利权人地址: DC Washington
- 主分类号: C23C14/22
- IPC分类号: C23C14/22 ; H01J27/02 ; H01J27/14 ; C23C14/32
摘要:
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
公开/授权文献
- US5982184A Test head for integrated circuits 公开/授权日:1999-11-09
信息查询
IPC分类: